Ceramics Materials detail
MACOR®
Machining tolerances are surprisingly tight.
MACOR® is an ideal material in ultra-high-vacuum environments, its zero porosity contributes to no outgassing and lower helium permeability.
Feature
- Ultra-precision machining
- Surface finishes
Cutting<4μm, Grinding<2μm and Polishing<0.01μm
Thin sheet thickness: Minimum 30 μm - Rate of gas permeation and outgassing are lower than Pyrex glass
- Excellent resistance to radiation
Dielectric Breakdown voltage 40kV/mm
Volume Resistivity 1016Ωcm at RT - Low thermal conductivity
Applications
Insulating materials in vacuum, Medical equipment parts,Insulating materials for radiation therapy machine, Electric gun parts, Ultra low temperature applications
SHAPAL®Hi Msoft
SHAPAL®Hi Msoft provides a flexural strength similar to Alumina and high thermal conductivity.
Maintains its flexural strength up to 1,000℃.
Feature
- High thermal conductivity (92W/m・K)
- Excellent rigidity
- Outstanding electric characteristics
Dielectric breakdown voltage 50～60KV/mm
Volume resistivity 1014Ωcm at RT - Low coefficient of thermal expansion
- Excellent heat resistance
Applications
Thermal dissipation, Dielectric strength in vacuum chamber, Substrate material, Bush, Nozzle for high temperature
Boron-nitride
Boron-nitride and Aluminum-nitride have unique characteristics such as high thermal conductivity and low thermal expansion
Feature
- Excellent thermal shock resistance (T=1500℃)
- Low wettability and high-corrosion resistant to molten metals
- High thermal conductivity
- Maintain high performance at high temperature because of its chemical durability
Applications
High temperature dielectric strength, Fixtures and crucible for molten metals, Shelf board for heat treatment
Aluminum-nitride
Boron-nitride and Aluminum-nitride have unique characteristics such as high thermal conductivity and low thermal expansion
Feature
- High thermal conductivity
- Coefficient of thermal conductivity similar to Silicon
- Withstand fluorine plasma
Applications
Semiconductor manufacturing equipment parts, Heat sink
Alumina
Versatile material representing engineering ceramics because of its excellent mechanical and electrical properties.
Large size is available at inexpensive price.
Feature
- High strength and wear resistance
- Excellent chemical durability
- Comparatively-inexpensive materials
- Excellent heat resistance
Applications
Nozzle, Semiconductor manufacturing equipment parts, High temperature insulating parts
Zirconia
Zirconia provides the highest strength and toughness at RT.
Feature
- Excellent fracture toughness
- Excellent chemical durability
- Excellent wear resistance and self-lubrication
- Available high precision finishing
- Prevents light reflection with black color Zirconia
Applications
Oilless bearing, Electronic components inspection equipment parts, Mold parts, Guide roller, Wear-resistantparts and fixtures
● Black color Zirconia is also available. Its demand is growing in the field of image processing inspection device for anti-reflection parts .
Silicon-carbide
Silicon-carbide provides an excellent rigidity and corrosion resistance.
Feature
- Excellent corrosion resistance
- Maintains its flexural strength at high temperature.
- High thermal conductivity
Applications
Semiconductor and LCD panel manufacturing equipment parts, Heat resisting parts, Anti corrosive parts,Shelf board treatment parts
